Lithographic band gap tuning in photonic band gap crystals

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Lithographic band gap tuning in photonic band gap crystals

We describe the lithographic control over the spectral response of three-dimensional photonic crystals. By precise microfabrication of the geometry using a reproducible and reliable procedure consisting of electron beam lithography followed by dry etching, we have shifted the conduction band of crystals within the near-infrared. Such microfabrication has enabled us to reproducibly define photon...

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ژورنال

عنوان ژورنال: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

سال: 1996

ISSN: 0734-211X

DOI: 10.1116/1.588601